Magellan XHR SEM

The Magellan XHR is the world's first extreme high resolution scanning electron microscope (SEM). The Magellan XHR model 400L renders unequaled surface-sensitive imaging performance at sub-nanometer resolution, without compromising the analytical capabilities, sample flexibility or ease of use of a traditional analytical SEM. With sub-nm resolution at voltages from 1 to 30 kV, plus a large tiltable stage for 3-D surface imaging of large or multiple samples, this revolutionary new XHR SEM allows the scientist see things he has never seen before.

Sub-nanometer resolution across the 1 to 30kV range has critical value in scientific research and industrial R&D. In addition, it is an absolute requirement in process development, monitoring and control applications in advanced semiconductor manufacturing and the electronics industry. The Magellan XHR SEM family of microscopes extends this capability to applications that were previously impossible or impractical with conventional scanning electron microscopes (SEM), transmission electron microscopes (TEM) or focused ion beam (FIB) systems.

The Magellan Family is available in two models: The Magellan XHR SEM 400, which is optimized for scientific research, and the Magellan™ XHR SEM 400L, engineered for semiconductor labs and other electronics applications. The Magellan XHR SEM 400L comes with an automated loadlock that speeds-up sample throughput, and includes a retractable solid state backscatter electron detector (SSBSED) and S2 compliance kit, all standard equipment. Both models remain highly configurable with more detectors (STEM, EDS and more), a cryostage, specialized holders and many more. An optional full environmental enclosure can be added to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs.

The Magellan XHR Scanning Electron Microscope can be acquired at www.fei.com